| Product | m-Xylene |
|---|---|
| Manufacturer | Sigma-Aldrich |
| Composition | 100% m-xylene; liquid |
| Synonyms | 1,3-dimethylbenzene, 1,3-xylene, m-xylol |
| Typical Uses | Solvent for electron-beam lithography resist |
| Hazards | 
Aspiration hazard Category 1
,
Skin corrosion/irritation Category 2
, Short-term (acute) aquatic hazard Category 2,
Serious eye damage/eye irritation Category 2A
, Long-term (chronic) aquatic hazard Category 3,
Specific target organ toxicity – single exposure Category 3
(respiratory system),
Flammable liquids Category 3
,
Acute toxicity Category 4
(inhalation),
Acute toxicity Category 4
(dermal) |
| Storage | Cabinet 6 (flammables cabinet in Wet Aisle 2) |
| Disposal | Solid: Organic waste / organic sharps waste containers in primary or secondary litho areas. Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A. |
| Comments | EBL resists using m-xylene as the solvent must be spun in foil-lined Headway spinner and soft baked in the Aisle 1 Fumehood. |
| Status |
Check First
Please contact a nanoFAB staff member for uses not listed above.