| Product | ZEP 520A |
|---|---|
| Manufacturer | ZEON Specialty Materials Inc. |
| Composition | 88.5–89.5% anisole, 10.5–11.5% methyl styrene/chloromethyl acrylate copolymer; liquid |
| Synonyms | ZEP |
| Typical Uses | Electron-beam lithography resist |
| Hazards |
Flammable liquids Category 3
|
| Storage | Cabinet 15 and 16 (flammables fridges) |
| Disposal | Solid: Organic waste / organic sharps waste containers in primary or secondary litho areas. Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A. |
| Comments | Resist must be spun in Brewer spinner or spinners in Aisle 1 Fumehood. |
| Status |
Check First
Please contact a nanoFAB staff member for uses not listed above.