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ProductZEP 520A
ManufacturerZEON Specialty Materials Inc.
Composition88.5–89.5% anisole, 10.5–11.5% methyl styrene/chloromethyl acrylate copolymer; liquid
Synonyms

ZEP

Typical UsesElectron-beam lithography resist
Hazards

1 0 2

Flammable

Flammable liquids Category 3

StorageCabinet 15 and 16 (flammables fridges)
DisposalSolid: Organic waste / organic sharps waste containers in primary or secondary litho areas.  Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A.
Comments
Status

STOCKED

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