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ManufacturerZEON Corporation
Composition100% pentyl acetate; liquid
Synonymsn-amyl acetate
Typical UsesDeveloper for ZEP-520A electron-beam lithography resist

1 0 3

Flammable Serious health effects Less serious health effects

Flammable liquids Category 3 ,  Serious eye damage/eye irritation Category 2B ,  Specific target organ toxicity – single exposure Category 3  (narcotic effects),   Specific target organ toxicity – single exposure Category 3  (respiratory tract irritation),  Specific target organ toxicity – repeated exposure Category 1  (nervous system)

StorageCabinet 6 (flammables cabinet in Wet Aisle 2)
DisposalLiquid:  solvent waste bottles in Litho Wet Deck #1/#2 or Wet Deck 1A/1B.  Solid:  organic waste pail or organic sharp waste pail under Fumehood Aisle 1.
CommentsUse in Litho Wet Deck #1/#2 for room-temperature development, or Cold Plate (Stir-Kool SK-12D) for cold development.  Must be poured in Litho Wet Deck #1/#2 or Wet Deck 1A/1B.


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Please contact a nanoFAB staff member for uses not listed above.