The nanoFAB partially supports its ongoing mandate through user fees charged for access to equipment, materials, training, and on-site expertise. These fees allow for the proper maintenance, upkeep, and operation of all equipment. These fees are applied either through an hourly equipment rate structure or a cap and subscription model. Some materials are charged separately as resale items. If you have any questions regarding usage fees, please contact Melissa Hawrelechko.

Equipment usage cap/subscription model:  effective .


CMC, Alberta Voucher, and IRAP sponsored projects must be administered separately.


Academic research cap

For high-volume internal academic research groups (paid via U of A SpeedCode), the nanoFAB offers the following cap, applying to tool use only (material costs are excluded):

  • $6000/quarterly billing period, invoiced quarterly.
  • Usage in excess of $12 000/quarterly billing period will be invoiced at 50% of the posted academic rates.

The following scenarios illustrate how the academic research cap applies as an academic group’s total quarterly tool usage increases:

$5000In one quarter, the group’s total tool usage comes to $5000.  This is below the cap threshold of $6000, so the academic cap does not apply.

Total charges: $5000.

$8000In one quarter, the group’s total tool usage comes to $8000.  This is above the cap threshold of $6000, but below the cap upper limit of $12 000, so the academic cap applies and they are invoiced a total of $6000.

Total charges:  $6000.

$15 000In one quarter, the group’s total tool usage comes to $15 000.  This is above the cap upper limit of $12 000, so the academic cap applies only to usage between $6000 and $12 000, for which they are charged $6000, with the usage exceeding the upper limit ($15 000 – $12 000 = $3000) invoiced at 50%.

Total charges:  $6000 + ($3000 × 50%) = $7500.


Industrial subscription

For high-volume industrial groups committing to a term of least 6 months, the nanoFAB offers the following subscription model, applying to tool use only (material costs are excluded):

  1. Allowed term lengths are from 6 to 12 months.
  2. Subscription fees are invoiced in advance each month.
  3. Subscription fees are available in $500/month increments, starting at a minimum of $3000/month.
  4. Equipment usage is averaged over the length of the subscription term.
  5. At any time, the usage associated with a particular tool may be removed from the subscription model.
  6. At any time within a subscription term, a group may elect to increase their monthly subscription fee in $500 increments (e.g., to account for more usage than anticipated). The new rate will be applied retroactively to the entire term. When the increase is requested, an invoice will be generated to cover the difference in subscription fees that would have been collected at the revised rate to that point in the subscription term.
  7. Within a subscription term, no changes to the value:cost ratio are allowed.
  8. Overage (usage exceeding the maximum value covered by the subscription rate) within a subscription period will be invoiced at posted industrial rates.
  9. The maximum monthly value covered depends on the subscription rate, according to the following table and graph.


Monthly subscription rateValue:Cost ratioMaximum monthly value
$3000 to $65002:1$6000 to $13 000
$7000 to $10 5003:1$21 000 to $31 500
≥$11 0004:1≥$44 000


Relevant funding opportunities

CMC MNT vouchers

Financial assistance for academic projects is available through CMC Microsystems:  please see CMC's MNT Award page for more information on this program.

Alberta Inovates vouchers

Industrial user groups are encouraged to apply to Alberta Innovates' Micro-Voucher program to help offset their nanoFAB usage costs.

NRC-IRAP program

Funding for industrial user groups is also available through the National Research Council of Canada Industrial Research Assistance Program (NRC IRAP).


Fee-for-service work

In addition to self-service access to equipment, the nanoFAB also offers custom fee-for-service fabrication and characterization services:

  • Fabrication and characterization services for academic and industrial clients, provided at competitive rates.
  • Quotes provided on a project-by-project basis and invoiced immediately upon completion of work.
  • For fabrication services, contact Aaron Hryciw.
  • For characterization services, contact Peng Li.

Individual equipment rates

The tool rates for individual nanoFAB tools are given below, divided by process area.  Most tools with a rate listed in $/hr have a 1-hour minimum charge associated with their use.  Some tools have different rates for usage during and outside normal business hours.

Wet processing

Tool Academic rate (business hours) Academic rate (after hours) Industrial rate (business hours) Industrial rate (after hours)
Aisle 3 Fumehood (General Use) $25.00/hr $25.00/hr $75.00/hr $75.00/hr
ISE KOH Bath - Wet Deck 2A $35.00/hr $35.00/hr $105.00/hr $105.00/hr
KOH/TMAH Etching (Aisle 2 Fumehood) $35.00/hr $35.00/hr $105.00/hr $105.00/hr
Wet Deck - General Use (1A/1B/2A) $25.00/hr $25.00/hr $75.00/hr $75.00/hr
Wet Deck - HF/BOE (1A/1B) $35.00/hr $35.00/hr $105.00/hr $105.00/hr
Wet Deck - Metal Etch (1A/1B) $35.00/hr $35.00/hr $105.00/hr $105.00/hr
Wet Deck - Piranha (2A) $35.00/hr $35.00/hr $105.00/hr $105.00/hr

Photolithography

Tool Academic rate (business hours) Academic rate (after hours) Industrial rate (business hours) Industrial rate (after hours)
ABM Contact Mask Aligner (Grover) $0.60/min $0.60/min $1.80/min $1.80/min
ABM Contact Mask Aligner - IR through-wafer (Bert) $0.60/min $0.60/min $1.80/min $1.80/min
Dymax BlueWave 200 (UV Spot Curing) $0.50/min $0.50/min $1.50/min $1.50/min
Heidelberg MLA150 (Maskless Aligner) $0.75/min $0.75/min $2.25/min $2.25/min
HMDS Oven (YES) $0.50/min $0.50/min $1.50/min $1.50/min
Nanoscribe PPGT+ (Two-Photon Polymerization) $7.00/hr $7.00/hr $21.00/hr $21.00/hr
Resist Developer Station #1/#2 $0.50/min $0.50/min $1.50/min $1.50/min
Resist Spin-Bake Station #1/#2 $0.50/min $0.50/min $1.50/min $1.50/min
SUSS Mask/Bond Aligner (MA/BA6) $0.75/min $0.75/min $2.25/min $2.25/min
UV Flood Exposure (Sunny) $0.50/min $0.50/min $1.50/hr $1.50/hr
Yamato Oven $15.00/hr $15.00/hr $45.00/hr $45.00/hr

Electron-beam lithography

Tool Academic rate (business hours) Academic rate (after hours) Industrial rate (business hours) Industrial rate (after hours)
Brewer Spinner and Hotplate $0.50/min $0.50/min $1.50/min $1.50/min
Cold Plate (Stir-Kool) $3.00/hr $3.00/hr $9.00/hr $9.00/hr
Fumehood (Aisle 1 - Laurell & Headway Spinners, Hotplates) $35.00/hr $35.00/hr $105.00/hr $105.00/hr
RAITH150 Two EBL System $60.00/hr $60.00/hr $150.00/hr $150.00/hr

Physical vapour deposition

Tool Academic rate (business hours) Academic rate (after hours) Industrial rate (business hours) Industrial rate (after hours)
Electron-Beam Evaporation System #1 (Gomez) $30.00/hr $15.00/hr $90.00/hr $45.00/hr
Electron-Beam Evaporation System #2 (PVD-75) $30.00/hr $15.00/hr $90.00/hr $45.00/hr
GLAD System (Achilles) $30.00/hr $30.00/hr $90.00/hr $90.00/hr
Parylene Deposition System $30.00/hr $30.00/hr $90.00/hr $90.00/hr
Sputtering System #1 (Bob) - DC sputtering $30.00/hr $15.00/hr $90.00/hr $45.00/hr
Sputtering System #1 (Doug) - DC/pulsed DC/reactive sputtering $30.00/hr $15.00/hr $90.00/hr $45.00/hr
Sputtering System #3 (Floyd) - DC sputtering, load-locked $30.00/hr $30.00/hr $90.00/hr $90.00/hr
Sputtering System #4 (Moe) - DC/RF/reactive sputtering, load-locked $30.00/hr $30.00/hr $90.00/hr $90.00/hr

Chemical vapour deposition

Tool Academic rate (business hours) Academic rate (after hours) Industrial rate (business hours) Industrial rate (after hours)
ALD - Kurt J Lesker 150 LX $30.00/hr $30.00/hr $90.00/hr $90.00/hr
LPCVD (poly-Si, B-doped poly-Si) - Tystar Tube 4 $40.00/hr $40.00/hr $300.00/hr $300.00/hr
LPCVD (SiNx) - Tystar Tube 2 $40.00/hr $40.00/hr $150.00/hr $150.00/hr
PECVD (SiO₂, SiNx) - Trion Orion $40.00/hr $40.00/hr $120.00/hr $120.00/hr
PECVD (SiO₂, SiNx, SiOxNy, a-Si) - Plasma-Therm Versaline $30.00/hr $30.00/hr $90.00/hr $90.00/hr

Dry etching

Tool Academic rate (business hours) Academic rate (after hours) Industrial rate (business hours) Industrial rate (after hours)
ICPRIE - Alcatel AMS110 (SiO₂ etch, Si DRIE) $40.00/hr $40.00/hr $120.00/hr $120.00/hr
ICPRIE - Oxford Cobra (metal, III-V, oxide etch) $40.00/hr $40.00/hr $120.00/hr $120.00/hr
ICPRIE - Oxford Estrelas (Si DRIE) $40.00/hr $40.00/hr $120.00/hr $120.00/hr
Plasma Ashing - Branson 3000 Barrel Etcher $25.00/hr $25.00/hr $75.00/hr $75.00/hr
RIE - Oxford NGP80 $30.00/hr $30.00/hr $90.00/hr $90.00/hr
RIE - Trion Phantom $30.00/hr $30.00/hr $90.00/hr $90.00/hr
Vapour HF Etcher - memsstar Orbis Alpha $30.00/hr $30.00/hr $90.00/hr $90.00/hr
XeF₂ Etching System $30.00/hr $30.00/hr $90.00/hr $90.00/hr

Oxidation and annealing

Tool Academic rate (business hours) Academic rate (after hours) Industrial rate (business hours) Industrial rate (after hours)
Anneal (atmospheric, exhausted) - Muffle Furnace (for PZT only) $15.00/hr $15.00/hr $45.00/hr $45.00/hr
Anneal (atmospheric, non-exhausted) - Muffle Furnace $15.00/hr $15.00/hr $45.00/hr $45.00/hr
Anneal (doped poly-Si, ohmic contacts) - Tystar Tube 5 $30.00/hr $30.00/hr $90.00/hr $90.00/hr
Anneal (general, glass bonding, no metals) - Tystar Tube 6 $30.00/hr $30.00/hr $90.00/hr $90.00/hr
Anneal (general, vacuum or N₂) - Vacuum Oven $15.00/hr $15.00/hr $45.00/hr $45.00/hr
Anneal (nitrogen, forming gas) - Minibrute Middle Furnace $30.00/hr $30.00/hr $90.00/hr $90.00/hr
Anneal (nitrogen, oxygen) - Minibrute Top Furnace $30.00/hr $30.00/hr $90.00/hr $90.00/hr
Rapid thermal anneal (N₂, Ar, forming gas) - Allwin AW610 RTA $40.00/hr $40.00/hr $120.00/hr $120.00/hr
Thermal oxidation (dry) - Tystar Tube 7 $45.00/hr $45.00/hr $135.00/hr $135.00/hr
Thermal oxidation (wet) - Tystar Tube 7 $40.00/hr $40.00/hr $120.00/hr $120.00/hr

Dicing and packaging

Tool Academic rate (business hours) Academic rate (after hours) Industrial rate (business hours) Industrial rate (after hours)
Dicing Saw (glass, Si, sapphire) - Disco DAD 3240 $40.00/hr $40.00/hr $120.00/hr $120.00/hr
Dicing Saw (Si) - Disco DAD 321 $40.00/hr $40.00/hr $120.00/hr $120.00/hr
Manual scribe and break system $0.00/hr $0.00/hr $0.00/hr $0.00/hr
Precision drill press (glass and Si) - Servo 7140-M $10.00/hr $10.00/hr $30.00/hr $30.00/hr
Wire bonder - TPT HB16 $40.00/hr $40.00/hr $120.00/hr $120.00/hr

Other fabrication

Tool Academic rate (business hours) Academic rate (after hours) Industrial rate (business hours) Industrial rate (after hours)
Critical Point Dryer - Tousimis 815b $30.00/hr $30.00/hr $90.00/hr $90.00/hr
PDMS Process Area $25.00/hr $25.00/hr $75.00/hr $75.00/hr
UV/Ozone Bonder $15.00/hr $15.00/hr $45.00/hr $45.00/hr
Vacuum Desiccator $15.00/hr $15.00/hr $45.00/hr $45.00/hr

Microscopy

Tool Academic rate (business hours) Academic rate (after hours) Industrial rate (business hours) Industrial rate (after hours)
AFM - Dimension Edge $30.00/hr $30.00/hr $90.00/hr $90.00/hr
Carbon/Metal Coater - Leica ACE600 $60.00/hr $60.00/hr $180.00/hr $180.00/hr
Confocal Microscope - Olympus Laser Confocal OLS 3000 $30.00/hr $30.00/hr $90.00/hr $90.00/hr
FESEM - Hitachi S4800 $60.00/hr $60.00/hr $150.00/hr $150.00/hr
FESEM - Zeiss Sigma FESEM - Imaging $60.00/hr $60.00/hr $150.00/hr $150.00/hr
FESEM - Zeiss Sigma FESEM w EDX/EBSD $80.00/hr $80.00/hr $150.00/hr $150.00/hr
FIB/SEM - ThermoFisher Helios Hydra PFIB/SEM $150.00/hr $150.00/hr $450.00/hr $450.00/hr
Gold Coater - Denton $0.50/min $0.50/min $1.50/min $1.50/min
Helium Ion Microscope - Zeiss Orion NanoFAB HiM $80.00/hr $80.00/hr $200.00/hr $200.00/hr
Helium Ion Microscope - Zeiss Orion NanoFab HiM w/ Ga-FIB $100.00/hr $100.00/hr $250.00/hr $250.00/hr
IBSS Contamination Control System $30.00/hr $30.00/hr $90.00/hr $90.00/hr
Nikon Eclipse LV150 Inspection Microscope #1/#2 $0.50/min $0.50/min $1.50/min $1.50/min
Optical Microscope - Zeiss AXIO Lab.A1 $0.50/min $0.50/min $1.50/min $1.50/min
Optical Microscope - Zeiss Stemi 508 $0.50/min $0.50/min $1.50/min $1.50/min
Raman - Renishaw InVIa Confocal Raman Microscope $30.00/hr $30.00/hr $90.00/hr $90.00/hr
S/TEM - JEOL ARM 200cF S/TEM $60.00/hr $60.00/hr $150.00/hr $150.00/hr
S/TEM - JEOL ARM 200cF S/TEM /w EDX $80.00/hr $80.00/hr $200.00/hr $200.00/hr
SEM - Tescan Vega-3 SEM w/EDX $25.00/hr $25.00/hr $50.00/hr $50.00/hr
SEM - Zeiss EVO M10 SEM - imaging $30.00/hr $30.00/hr $100.00/hr $100.00/hr
SEM - Zeiss EVO M10 w/EDX $40.00/hr $40.00/hr $100.00/hr $100.00/hr
XRM/nanoCT - ZEISS Xradia Versa 620 $75.00/hr $75.00/hr $200.00/hr $200.00/hr
Zeiss AXIO Lab.A1-3 inspection microscope (10k area) $0.50/min $0.50/min $1.50/min $1.50/min
Zeiss AXIO Lab.A1-3 inspection microscope (cleanroom) $0.50/min $0.50/min $1.50/min $1.50/min
Zeiss Stemi 508-2 stereomicroscope (cleanroom) $0.50/min $0.50/min $1.50/min $1.50/min

Spectroscopy

Tool Academic rate (business hours) Academic rate (after hours) Industrial rate (business hours) Industrial rate (after hours)
BrukerD8Dplus.staff.analysis $150.00/hr $150.00/hr $200.00/hr $200.00/hr
FTIR - iS50 $30.00/hr $30.00/hr $90.00/hr $90.00/hr
NIR-UV Spectrophotometer - Perkin-Elmer NIR-UV $30.00/hr $30.00/hr $90.00/hr $90.00/hr
UV/VIS Spectrophotometer - Hitachi U-3900H $30.00/hr $30.00/hr $90.00/hr $90.00/hr
VASE Ellipsometer - J.A. Woollam M-2000V $0.50/min $0.50/min $1.50/min $1.50/min
VASE Ellipsometer - J.A. Woollam VASE VB-400 $30.00/hr $30.00/hr $90.00/hr $90.00/hr
XPS - Kratos Ultra $60.00/hr $60.00/hr $200.00/hr $200.00/hr
XPS - PHI VP3 Scanning Probe $60.00/hr $60.00/hr $150.00/hr $150.00/hr
XRD - Bruker D8 $30.00/hr $30.00/hr $150.00/hr $150.00/hr
XRD - Bruker D8D plus XRD-XRR-SAXS $60.00/hr $0.00/hr $120.00/hr $0.00/hr
XRD - Rigaku Ultima IV $30.00/hr $30.00/hr $90.00/hr $90.00/hr

Other characterization

Tool Academic rate (business hours) Academic rate (after hours) Industrial rate (business hours) Industrial rate (after hours)
Alpha-Step IQ (cleanroom) $0.50/min $0.50/min $1.50/min $1.50/min
Alpha-Step IQ (W1-040) $0.50/min $0.50/min $1.50/min $1.50/min
Autosorb iQ $90.00/day $90.00/day $270.00/day $270.00/day
Characterization Fumehood $0.00/hr $0.00/hr $0.00/hr $0.00/hr
Contact Angle (FTA-200) $10.00/hr $10.00/hr $20.00/hr $20.00/hr
Discovery TGA $45.00/hr $45.00/hr $135.00/hr $135.00/hr
Eppendorf Centrifuge 5804R $10.00/hr $30.00/hr $30.00/hr $90.00/hr
Filmetrics F10-VC $0.50/min $0.50/min $1.50/min $1.50/min
Filmetrics F50-UV (cleanroom) $0.50/min $0.50/min $1.50/min $1.50/min
Fluxim Paios Spectrometer $50.00/hr $50.00/hr $150.00/hr $150.00/hr
Four Point Probe (cleanroom) $0.50/min $0.50/min $1.50/min $1.50/min
Four-Point Probe (Pro4 4000) $0.50/min $0.50/min $1.50/min $1.50/min
Hall Measurement - Nanometrics HL5500 $20.00/hr $20.00/hr $60.00/hr $60.00/hr
Keithley 4200 - Semiconductor Characterization System (SCS Analyzer) $25.00/hr $25.00/hr $75.00/hr $75.00/hr
Leica RES102 Ion Milling $30.00/hr $30.00/hr $100.00/hr $100.00/hr
Nikon Eclipse L200N Inspection Microscope (cleanroom) $0.50/min $0.50/min $1.50/min $1.50/min
Probe Station - Wentworth #1/#2 $20.00/hr $20.00/hr $60.00/hr $60.00/hr
Savant SuperModulyo Freeze Dryer $10.00/hr $10.00/hr $30.00/hr $30.00/hr
Thin Film Stress Measurement - Toho FLX 2320S $0.50/min $0.50/min $1.50/min $1.50/min
Zygo Optical Profilometer $30.00/hr $30.00/hr $90.00/hr $90.00/hr

Software (shared computation area)

Tool Academic rate (business hours) Academic rate (after hours) Industrial rate (business hours) Industrial rate (after hours)
Characterization software: Casa-XPS, JADE-XRD, Aztec EDX, Gatan DM, JEOL ED $0.00/hr $0.00/hr $0.00/hr $0.00/hr
DeScribe (offline processing) $0.00/hr $0.00/hr $0.00/hr $0.00/hr
Dragonfly (offline processing) $5.00/hr $3.00/hr $15.00/hr $9.00/hr
KLayout $0.00/hr $0.00/hr $0.00/hr $0.00/hr
Raith Nanosuite (offline processing) $0.00/hr $0.00/hr $0.00/hr $0.00/hr


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