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ProductTetrabutylammonium fluoride solution
Composition75% tetrabutylammonium fluoride, 25% water; liquid
SynonymsTBAF solution
Typical UsesMixed with PGMEA to dissolve cured PDMS.

3 0 0 Corrosive

Serious eye damage/eye irritation Category 1 , Skin corrosion/irritation Category 1A

StorageCabinet 5 (flammables cabinet in Wet Aisle 2)
DisposalSolid: Organic waste / organic sharps waste containers in primary or secondary litho areas.  Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A.


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Please contact a nanoFAB staff member for uses not listed above.