| Product | Tetrabutylammonium fluoride solution |
|---|---|
| Manufacturer | Sigma-Aldrich |
| Composition | 75% tetrabutylammonium fluoride, 25% water; liquid |
| Synonyms | TBAF solution |
| Typical Uses | Mixed with PGMEA to dissolve cured PDMS. |
| Hazards |
Serious eye damage/eye irritation Category 1
,
Skin corrosion/irritation Category 1A
|
| Storage | Cabinet 5 (flammables cabinet in Wet Aisle 2) |
| Disposal | Solid: Organic waste / organic sharps waste containers in primary or secondary litho areas. Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A. |
| Comments | |
| Status | STOCKED |
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Please contact a nanoFAB staff member for uses not listed above.