Solid: Organic waste / organic sharps waste containers in primary or secondary litho areas. Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A.
Spinning and baking may be done in Fumehood (Aisle 1) only: spin in foil-lined Headway spinner and bake on hot plates in fume hood. May be used in RIE (Trion), RIE (Oxford NGP80), or ICPRIE (Cobra Reactive Etch) for etchback to planarize underlying dielectric.
Please contact a nanoFAB staff member for uses not listed above.