| Product | PMGI SFG Slow Series Resists |
|---|---|
| Manufacturer | MicroChem Corp. |
| Composition | 65–85% cyclopentanone, 10–15% 1-methoxy-2-propanol, 0.2–20% polyaliphatic imide copolymer; liquid |
| Synonyms | PGMI |
| Typical Uses | Photolithography for lift-off processes |
| Hazards | 
Specific target organ toxicity – repeated exposure Category 2
(central nervous system, kidneys, liver),
Skin corrosion/irritation Category 2
,
Serious eye damage/eye irritation Category 2A
,
Flammable liquids Category 3
,
Specific target organ toxicity – single exposure Category 3
(respiratory irritation),
Acute toxicity Category 4
(skin contact, inhalation) |
| Storage | Cabinet 11 (flammables cabinet in Wet Aisle 1) |
| Disposal | Solid: Organic waste / organic sharps waste buckets under Aisle 1 fumehood. Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A. |
| Comments | Generally used for a lift-off bilayer process; similar to LOR series resists. |
| Status |
Check First
Please contact a nanoFAB staff member for uses not listed above.