Solid: Organic waste / organic sharps waste containers in primary or secondary litho areas. Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A.
Developing must occur within Aisle 1 fumehood. A puddle develop process may be done using the Laurell spinner, lid open (interlock defeated using a magnetic stir rod), with a foil chimney surrounding the chuck, such that all developer is caught in the chimney and flows into the spinner waste. Pour a working volume of PA 400 R into a small beaker to use during puddle develop process.
Please contact a nanoFAB staff member for uses not listed above.