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ProductLOR 5B (LOR B series resists)
ManufacturerMicroChem Corp.
Composition65–90% cyclopentanone, 10–15% 1-methoxy-2-propanol, 1–20% polyaliphatic imide copolymer, 0.1–2%proprietary dye B; liquid
SynonymsLOR
Typical UsesPhotolithography for lift-off processes
Hazards

2 0 3

Flammable Less serious health effects

Skin corrosion/irritation Category 2 ,  Serious eye damage/eye irritation Category 2A ,  Flammable liquids Category 3 ,  Specific target organ toxicity – single exposure Category 3 ,  Acute toxicity Category 4

StorageCabinet 11 (flammables cabinet in Wet Aisle 1)
DisposalSolid: Organic waste / organic sharps waste buckets under Aisle 1 fumehood.  Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A.
CommentsGenerally used with AZ 1512 for a lift-off bilayer process.
Status

STOCKED  

Check First

Please contact a nanoFAB staff member for uses not listed above.

ProductLOR 5B (LOR B series resists)
ManufacturerMicroChem Corp.
Composition65–90% cyclopentanone, 10–15% 1-methoxy-2-propanol, 1–20% polyaliphatic imide copolymer, 0.1–2%proprietary dye B; liquid
SynonymsLOR
Typical UsesPhotolithography for lift-off processes
Hazards

2 0 3

Flammable Less serious health effects

Skin corrosion/irritation Category 2 ,  Serious eye damage/eye irritation Category 2A ,  Flammable liquids Category 3 ,  Specific target organ toxicity – single exposure Category 3 ,  Acute toxicity Category 4

StorageResist cabinet in wet aisle 2.
DisposalSolid: Organic waste / organic sharps waste buckets under Aisle 1 fumehood.  Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A.
CommentsGenerally used with AZ 1512 for a lift-off bilayer process.
Status

STOCKED  

Check First

Please contact a nanoFAB staff member for uses not listed above.