| Product | LOR 5B (LOR B series resists) |
|---|---|
| Manufacturer | MicroChem Corp. |
| Composition | 65–90% cyclopentanone, 10–15% 1-methoxy-2-propanol, 1–20% polyaliphatic imide copolymer, 0.1–2%proprietary dye B; liquid |
| Synonyms | LOR |
| Typical Uses | Photolithography for lift-off processes |
| Hazards |
Skin corrosion/irritation Category 2 , Serious eye damage/eye irritation Category 2A , Flammable liquids Category 3 , Specific target organ toxicity – single exposure Category 3 , Acute toxicity Category 4 |
| Storage | Cabinet 11 (flammables cabinet in Wet Aisle 1) |
| Disposal | Solid: Organic waste / organic sharps waste buckets under Aisle 1 fumehood. Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A. |
| Comments | Generally used with AZ 1512 for a lift-off bilayer process. |
| Status | STOCKED |
Check First
Please contact a nanoFAB staff member for uses not listed above.
Data sheet
| Product | LOR 5B (LOR B series resists) |
|---|---|
| Manufacturer | MicroChem Corp. |
| Composition | 65–90% cyclopentanone, 10–15% 1-methoxy-2-propanol, 1–20% polyaliphatic imide copolymer, 0.1–2%proprietary dye B; liquid |
| Synonyms | LOR |
| Typical Uses | Photolithography for lift-off processes |
| Hazards |
Skin corrosion/irritation Category 2 , Serious eye damage/eye irritation Category 2A , Flammable liquids Category 3 , Specific target organ toxicity – single exposure Category 3 , Acute toxicity Category 4 |
| Storage | Resist cabinet in wet aisle 2. |
| Disposal | Solid: Organic waste / organic sharps waste buckets under Aisle 1 fumehood. Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A. |
| Comments | Generally used with AZ 1512 for a lift-off bilayer process. |
| Status | STOCKED |
Check First
Please contact a nanoFAB staff member for uses not listed above.