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ProductHydrogen peroxide
Composition25–35% hydrogen peroxide, 65–75% water; liquid 
Synonymsperoxide, hydrogen dioxide solution
Typical UsesComponent of piranha solution, W/TiW wet etch

OX 3 1 0

Corrosive Less serious health effects

Serious eye damage/eye irritation Category 1 ;  Skin corrosion/irritation Category 1A ;  Short-term (acute) aquatic hazard  Category 2 ; Long-term (chronic) aquatic hazard  Category 3 ;  Specific target organ toxicity – single exposure Category 3  (respiratory system);  Acute toxicity Category 4  (oral)

StorageCabinet 2 (oxidizer cabinet in Wet Aisle 2)
DisposalAspirated or dumped to wet deck
CommentsAll hydrogen-peroxide-containing solutions, including waste, must be stored in vented bottles.  Sealed bottles pose an explosion risk, since pressure would up as the peroxide decomposes.


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Please contact a nanoFAB staff member for uses not listed above.