Respiratory or skin sensitization Category 1
Reproductive toxicity Category 1B
Skin corrosion/irritation Category 2
Serious eye damage/eye irritation Category 2A
Specific target organ toxicity – single exposure Category 3
Stock bottle to be stored in Cabinet 14 (flammables fridge). Working quantities may be poured into amber bottles and stored at room temperature in Cabinet 11 (photoresist cabinet in aisle 1).
Solid: Organic waste / organic sharps waste containers in primary or secondary litho areas. Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A.
To be spun onto substrates, followed by a soft bake on a hotplate. Transfer and mixing of HD 4100 must be performed in the Aisle 1 fumehood. Must be spun using the Headway Spinner, with a foil-lined bowl, in the Aisle 1 fumehood. Softbake on a hotplate in this fumehood. Curing allowed in Bottom Minibrute furnace.
Please contact a nanoFAB staff member for uses not listed above.