ProductHD 4100
ManufacturerHD MicroSystems
Composition<1% methanol, 1–10% 3,6,9-trioxaundecamethylene dimethacrylate, 50–60% n-methyl-2-pyrrolidone, 35–45% non-regulated ingredients; liquid
Typical UsesPhotodefinable spin-on polyimide

2 1 2 Serious health effects Less serious health effects

Respiratory or skin sensitization Category 1 ; Reproductive toxicity Category 1B , Skin corrosion/irritation Category 2 ; Serious eye damage/eye irritation Category 2A , Specific target organ toxicity – single exposure Category 3 (respiratory system)

StorageStock bottle to be stored in Cabinet 14 (flammables fridge). Working quantities may be poured into amber bottles and stored at room temperature in Cabinet 11 (photoresist cabinet in aisle 1).
DisposalSolid: Organic waste / organic sharps waste containers in primary or secondary litho areas.  Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A.  
CommentsTo be spun onto substrates, followed by a soft bake on a hotplate.  Transfer and mixing of HD 4100 must be performed in the Aisle 1 fumehood.  Must be spun using the Headway Spinner, with a foil-lined bowl, in the Aisle 1 fumehood.  Softbake on a hotplate in this fumehood.  Curing allowed in Bottom Minibrute furnace.

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Please contact a nanoFAB staff member for uses not listed above.