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ProductFluorinert FC-72 Electronic Liquid
Manufacturer

3M Canada Company

Composition100% perfluoro compounds, C5-18; liquid
Synonymsperfluorodecane
Typical UsesAlternative solvent for CTXSP2 polymer, used for stripping and lift-off.
Hazards

3 0 1  

Not classified as hazardous.

StorageCabinet 5 (organic solvents)
DisposalLiquid:  Collect waste in dedicated "Halogenated waste" bottle, to be stored in Cabinet 5 until full.  Solid:  Organic waste / organic sharps waste containers in primary or secondary litho areas.
Comments

Use in litho wetdecks or Aisle 1 General Use wetdecks for lift-off/stripping processing.

(warning) Avoid elevated temperatures (≥200 °C):  thermal decomposition products include hydrogen fluoride (HF), and perfluoroisobutylene (PFIB).

Status


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Please contact a nanoFAB staff member for uses not listed above.