Specific target organ toxicity – single exposure Category 3
(lungs);
Acute toxicity Category 4
(ingestion)
Storage
Cabinet 10(misc. chemicals cabinet in Wet Aisle 1)
Disposal
Organic waste / organic sharps waste containers in primary or secondary litho areas.
Comments
May be spin-coated in foil-lined Headway spinner in Aisle 1 fumehood, or foil-lined Laurell spinner in PDMS fumehood. Curing in general-purpose vacuum oven is permitted.
Status
RESTRICTED
Check First
Please contact a nanoFAB staff member for uses not listed above.