Product

Cobalt iron boron (sputtering target)

ManufacturerKurt J Lesker Company
Composition60% cobalt, 20% iron, 20% boron; solid
SynonymsCoFeB
Typical UsesThin-film material deposited via sputtering.
Hazards

2 0 1  

Serious health effects

Respiratory or skin sensitization Category 1
, Hazardous to the aquatic environment, chronic Category 4 (from cobalt content)

StorageSputtering target cabinet next to Sputtering System #4 (Moe).
DisposalCollected and disposed of as hazardous waste.
CommentsApproved for sputtering in Sputtering System #4 (Moe).
Status

  


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