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ProductBoron Trichloride
ManufacturerMatheson / Chrysalis
Composition

BCL3

SynonymsInert Gas(es) (Ar, He and/or N) - Boron Trichloride 0.1 ppm - 2.99999%
Typical UsesEtch Gas - Cobra ICPRIE
Hazards

3 1 0  

Pressurized Corrosive Toxic Less serious health effects

StorageTo be stored in accordance with NFPA 55
DisposalOnly available for use in contained systems with appropriate abatement
CommentsThis is a gas mixture delivered under sub-atmospheric conditions
Status

STOCKED RESTRICTED USE 

Check First

Please contact a nanoFAB staff member for uses not listed above.

Additional SDS Reference