| Product | Benzophenone in xylene solution |
|---|---|
| Manufacturer | AquaPhoenix Scientific (benzophenone); Fisher Scientific (xylenes) |
| Composition | ≤40% w/w benzophenone, ≥60% w/w xylenes; liquid |
| Synonyms | diphenylmethanone, diphenyl ketone, benzoylbenzene (benzophenone); o-xylene, 1,2-dimethylbenzene, m-xylene, 1,3-dimethylbenzene, p-xylene, 1,4-dimethylbenzene (xylenes) |
| Typical Uses | Photoinitiator for photodefinable PDMS (refs. [1], [2]) |
| Hazards |
Aspiration hazard Category 1
, Acute hazards to the aquatic environment Category 1, Chronic hazards to the aquatic environment Category 1,
Skin corrosion/irritation Category 2
,
Serious eye damage/eye irritation Category 2
,
Specific target organ toxicity – repeated exposure Category 2
(kidney, liver, blood),
Carcinogenicity Category 2
,
Flammable liquids Category 3
,
Specific target organ toxicity – single exposure Category 3
(respiratory system, central nervous system),
Acute toxicity Category 4
(dermal),
Acute toxicity Category 4
(inhalation) |
| Storage | Cabinet 6 (flammables cabinet in Wet Aisle 2) |
| Disposal | Seal all waste (including foil liners, pipettes, cleanroom wipes, etc.) in a large Ziploc bag, and dispose of in red organic sharps waste pail in secondary litho area. Ziploc bags are provided in the cabinet at the end of the wet aisle table, opposite the resist fridges. |
| Comments | All spin-coating, soft- and/or post-exposure-baking, and development must occur in Aisle 1 fumehood. Must be spun on in foil-lined Headway spinner and soft-baked and/or post-exposure-baked on a foil-lined hot plate in the fumehood. May be exposed using ABM mask aligners (Bert or Grover), using an exposure gap. Develop in toluene, using IPA as etch stop, in Wet Deck 1A/1B. |
| Status | RESTRICTED USE |
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Please contact a nanoFAB staff member for uses not listed above.