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ProductAZ 300 MIF Developer
ManufacturerEMD Performance Materials Corp
Composition>95% water, <3% tetramethylammonium hydroxide; liquid
Synonyms
Typical UsesDeveloper for photolithography
Hazards

2 0 0 Corrosive Less serious health effects

Corrosive to metals Category 1 ,  Skin corrosion/irritation Category 2 ,  Serious eye damage/eye irritation Category 2A , Acute toxicity Category 4  (oral)

StorageCabinet 13 (bases cabinet in Wet Aisle 1); underneath litho wet decks
DisposalPour into wet deck (Litho Wet Deck 1/2, Wet Deck 1A/1B/2A) and rinse copiously with DI water.
CommentsLogin to tool Litho Wet Deck #1 - TMAH or Litho Wet Deck #2 - TMAH when using.  Wear PPE when handling:  chemical-resistant gloves, acid apron, face shield.
Status



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