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ProductAZ 15nXT (450 CPS) photoresist

Merck KGaA

Composition1–3% 1,8-Naphthalimidyl triflate, 0.1–0.3% 2-Methoxy-1-propanol acetate, 50–100% 1-Methoxy-2-propyl acetate; liquid (only hazardous components listed)
SynonymsAZ 15nXT
Typical UsesThick negative photoresist optimised for plating

2 0 2   Flammable Less serious health effects

Flammable liquids Category 3 , Specific target organ toxicity – single exposure Category 3 (central nervous system)

StorageWorking volumes in amber bottles, stored in primary litho area; stock bottle in resist fridge outside W1-040
DisposalSolid: Organic waste / organic sharps waste containers in primary or secondary litho areas.  Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A.

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Please contact a nanoFAB staff member for uses not listed above.