| Product | AZ 15nXT (450 CPS) photoresist |
|---|---|
| Manufacturer | Merck KGaA |
| Composition | 1–3% 1,8-naphthalimidyl triflate, 0.1–0.3% 2-methoxy-1-propanol acetate, 50–100% 1-methoxy-2-propanol acetate; liquid (only hazardous components listed) |
| Synonyms | AZ 15nXT |
| Typical Uses | Thick negative photoresist optimised for plating |
| Hazards |
Flammable liquids Category 3
,
Specific target organ toxicity – single exposure Category 3
(central nervous system) |
| Storage | Working volumes in amber bottles, stored in primary litho area; stock bottle in resist fridge outside W1-040 |
| Disposal | Solid: Organic waste / organic sharps waste containers in primary or secondary litho areas. Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A. |
| Comments | |
| Status |
Check First
Please contact a nanoFAB staff member for uses not listed above.