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ProductAZ 12XT-20PL-10 photoresist
Manufacturer

EMD Performance Materials Corp.

Composition55–60% 1-Methoxy-2-propanol acetate, 20–25% Non-hazardous styrene-acrylate polymer, <0.3% 2-Methoxy-1-propanol acetate15–20% Cresol novolak resin; liquid
SynonymsAZ 12XT
Typical UsesChemically amplified thick positive photoresist
Hazards

2 0 2   Flammable Less serious health effects

Flammable liquids Category 3 , Specific target organ toxicity – single exposure Category 3 (central nervous system)

StorageWorking volumes in amber bottles, stored in primary litho area; stock bottle in resist fridge outside W1-040
DisposalSolid: Organic waste / organic sharps waste containers in primary or secondary litho areas.  Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A.
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