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ProductE-Beam Resist AR-P 6200 series
Manufacturer

Allresist GmbH

Composition>80% anisole, ≤20% poly(α-methyl styrene-co-α-chloroacrylate methylester); liquid 
Synonyms

CSAR 62

Typical UsesElectron-beam lithography resist
Hazards

1 0 2

Flammable

Flammable liquids Category 3

StorageCabinet 15 (flammables fridges)
DisposalSolid: Organic waste / organic sharps waste containers in primary or secondary litho areas.  Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A.
CommentsResist must be spun in Brewer spinner or spinners in Aisle 1 Fumehood.
Status


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Please contact a nanoFAB staff member for uses not listed above.