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ProductA-174 silane
ManufacturerSpecialty Coating Systems, Inc.
Composition70–100% 3-trimethoxysilylpropyl methacrylate, 0.1–1% 4-methoxy-phenol; liquid
Synonymsgamma-methacryloxypropyltrimethoxysilane, gamma-MAPS, 3-(trimethoxysilyl)propyl methacrylate
Typical UsesParylene adhesion promotion

0 0 2

Less serious health effects

Skin sensitization  Category 1

StoragePVD materials cabinet in 10k area; Cabinet 5 (flammables cabinet in Wet Aisle 2)
DisposalSolid: Organic waste / organic sharps waste containers in primary or secondary litho areas.  Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A.


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