ProductTris(dimethylamino)silane
ManufacturerStrem - Puratrem
Composition99.999%-Si
Synonyms3DMAS
Typical UsesALD Precursor
Hazards

W 3 2 0   Flammable Corrosive Toxic Less serious health effects

StorageInstalled on tool, inert glovebox, or gas cabinet
Disposalcylinders sent back to vendor for cleaning and refilling
Commentsdangerous goods
Status

STOCKED RESTRICTED USE 


Check First

Please contact a nanoFAB staff member for uses not listed above.