Overview

The Xradia Versa 620 is a high resolution X-ray microscope, providing high-throughput, non-destructive 3D microstructure analysis of versatile materials. 

LMACS Name

ZEISS Xradia Versa 620 XRay Microscope

Confluence Labelzeiss-xradia-620
Process Area

Characterization

ModelXradia 620 Versa
VendorZeiss
Team
Location

CME-L1-125



System Features

1.High power (25 W) X-Ray Source with energy range of 30 – 160 keV
2.Fully automatic control (filters, detectors, objectives) and reconstruction 
3.High spatial resolution – less than 500 nm
4.A two-stage magnification technique that produces high resolution imaging at large working distances (RaaD)
5.Versatile sample sizes and types – stage travel range: X – 50 mm, Y – 100 mm, Z – 50 mm
6.Integrated in-situ heating/mechanical testing stage
7.

DragonFly Pro for advanced 3D visualization and analysis