Overview

The ZEISS Sigma family combines field-emission SEM (FESEM) technology with an excellent user experience. Structure your imaging and analysis routines and increase productivity with Sigma’s intuitive 4-step workflow. You’ll capture more data, faster than ever before. Choose from a variety of detector options to tailor Sigma precisely to your applications: you can image particles, surfaces, nanostructures, thin films, coatings and layers. With the Sigma family you enter  the world of high-end imaging: Sigma 300 delivers excellence in price and performance while Sigma 500’s best-in-class EDS geometry delivers superb analytical performance. Count on accurate, reproducible results – from any sample, every time.

LMACS NameZeiss Sigma FeSEM
Confluence Labelzeiss-sigma-fesem
Process Area

Characterization

ModelSigma
VendorZeiss
Team

Peng Li Shiau-Yin Wu Devin Fortier Fenglin Liu 

System Features

1Resolution: 2 nm and 1 kV
2Gemini optics, Low voltage Imaging
3Different Detector for various sample type of Imaging requirement:  In-Lens,  SE , BSD, EDX and EBSD.
47 apertures to choose from plus High current mode option.
5Motorized stage for sample movement and tilt (up to 90 degree)
6
7

Documents

Operating Procedure

Zeiss Sigma FESEM SOP

Product Brochure

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1 Comment

  1. Michael Hume

    Melissa Hawrelechko  - Can you confirm that we did in fact pay for this service contract: 

    If so - can we put the PO in the proper drive folder -