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Overview

ORION NanoFab features the Nanopatterning and Visualization Engine - an integrated hardware and software control system. NVPE incorporates a dedicated 16 bit scan generator for each NanoFab column and dual signal acquisition hardware supporting real-time advanced patterning and visualization. Completely control the beam by a GUI: create a range of fully editable shapes including rectangles, trapezoids, polygons, lines, polylines, ellipses and spots. Vector-fill these shapes while maintaining full control over dose variation and patterning parameters.

LMACS NameZeiss Orion NanoFab Helium Ion Microscope (Trinity)
Confluence Labelzeiss-orion-heion-sem
Process Area

Characterization

ModelNanoFab Orion
VendorZeiss
Team

System Features

Documents

Operating Procedure


Hazard Assessment