|Thermal emission tungsten firing unit.|
|200 V to 30 kV accelerating voltage.|
|5 axis X, Y, Z, rotational, and tilt stage controls.|
|Solid state secondary electron detector and backscattered electron detector.|
|~100 nm resolution, sample dependent.|
Starting , all trainees on the Zeiss EVO MA10 SEM at the nanoFAB are required to complete an online training course before they can start their first hands on training.
Please note, this training is delivered through eClass External. For more information please review University of Alberta - eClass External.