System Features
Thermal emission tungsten firing unit. |
200 V to 30 kV accelerating voltage. |
5 axis X, Y, Z, rotational, and tilt stage controls. |
Solid state secondary electron detector and backscattered electron detector. |
~100 nm resolution, sample dependent. |
Training Pre-Requisites
Starting , all trainees on the Zeiss EVO MA10 SEM at the nanoFAB are required to complete an online training course before they can start their first hands on training.
Delivery | eClass External |
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Course Name | Zeiss EVO MA10 SEM Training |
Please note, this training is delivered through eClass External. For more information please review University of Alberta - eClass External.
Documents
Operating Procedure & Hazard Assessments |
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Related Documents