Overview

The instruments of the EVO family combine high performance scanning electron microscopy with an intuitive, user-friendly experience that appeals to both trained microscopists and new users. With its comprehensive range of available options, EVO can be tailored precisely to your requirements, whether you are in life sciences, material sciences, or routine industrial quality assurance and failure analysis.

LMACS NameZeiss EVO MA10 SEM
Confluence Labelzeiss-evo-ma10-sem
Process Area

Characterization

ModelEVO MA10
VendorZeiss
Team

Peng Li Shiau-Yin Wu Devin Fortier 

System Features

Thermal emission tungsten firing unit.
200 V to 30 kV accelerating voltage.
5 axis X, Y, Z, rotational, and tilt stage controls.
Solid state secondary electron detector and backscattered electron detector.
~100 nm resolution, sample dependent.

Documents

Operating Procedure & Hazard Assessments

Zeiss EVO MA10 SOP & HA Listing

Related Documents