Overview

The instruments of the EVO family combine high performance scanning electron microscopy with an intuitive, user-friendly experience that appeals to both trained microscopists and new users. With its comprehensive range of available options, EVO can be tailored precisely to your requirements, whether you are in life sciences, material sciences, or routine industrial quality assurance and failure analysis.

LMACS NameZeiss EVO MA10 SEM
Confluence Labelzeiss-evo-ma10-sem
Process Area

Characterization

ModelEVO MA10
VendorZeiss
Team

Peng Li Fenglin Liu Shihong Xu Devin Fortier 

Location

ECERF W1-060A

System Features

Thermal emission tungsten firing unit.
200 V to 30 kV accelerating voltage.
5 axis X, Y, Z, rotational, and tilt stage controls.
Solid state secondary electron detector and backscattered electron detector.
~100 nm resolution, sample dependent.


Training Pre-Requisites

Starting , all trainees on the Zeiss EVO MA10 SEM at the nanoFAB are required to complete an online training course before they can start their first hands on training.


DeliveryeClass External
Course NameZeiss EVO MA10 SEM Training


Please note, this training is delivered through eClass External. For more information please review University of Alberta - eClass External.


Documents

Operating Procedure & Hazard Assessments

Zeiss EVO MA10 SOP & HA Listing

Related Documents