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nanoFAB Equipment
Standard Operating Procedures (SOP)
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Xenon Difluoride (XeF2) Etch System SOP
Equipment
XeF
2
Etch System
Process Area
Dry Etch
Location
W1-062
Hazard Assessment
Please adhere to specific procedures outlined in SOP document.
equipment
sop
etch
xef2
requires-update
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