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Overview

The Variable Angle Spectroscopic Ellipsometer is capable of high accuracy measurement of various optical properties of your thin films.

LMACS NameVASE Ellipsometer
Confluence Labelvase-vb-400
Process Area

Characterization

ModelVASE VB-400
VendorJ.A. Woollam
Team





System Features

Table to highlight system features these can be displayed in the format that makes the most sense for the tool. The table below is an example using an ICP-RIE

Documents

Operating Procedure
Hazard Assessment

2 Comments

  1. Peng Li  / Shihong Xu - can we clarify which system this page is for? VB-250 or M2000? I presume the 250 since the upgrade page is attached here. If that's true - will need to create a second page for the M-2000V

    1. For now I will record the SN / UofA tags for the M-2000V here - it seems the inventory people were very enthusiastic when tagging this system, there are so many. We can transfer later


      VASE M-2000V 

      ComponentUofA TagSN
      HTC-1005436220905104
      EC-4005436230909048
      M-2000V PS5436240909058
      Light Source543625
      *need to confirm the component
      Detector543626
      *need to confirm the component
      Base543627