Tescan Vega-3 SEM

Overview

System Features

Wafer Handling	pieces (mounted)	100 mm	150 mm
Gas Species	O₂	C₄F₈	SF₆	A_r
ICP Power	3 kW
RF Power	300 W
Chuck	-150 ºC (min)	80 ºC (max)	mechanical clamp	HBC

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