Overview

SemiTool 870-S double stack SRD. Top unit suitable for up to 150 mm substrates, bottom rotor suitable for 100m, round substrates.

LMACS Name

Sitek 870-S SRD (top - 150 mm round)  Sitek 870-S SRD (bottom - 100 mm round)

Confluence Labelsitek-semitool-870-s-srd
Process Area

Wet Processing

ModelSemiTool 870-S
VendorSitek Process
Team

Breanna Cherkawski Gustavo de Oliveira Luiz Scott Munro Timothy Harrison Adam Pettigrew Aaron Hryciw




Top - 150mm Round

Bottom - 100mm Round


System Features

Top Rotor150 mm (A190-60M-0215)
Botom Rotor100 mm (A190-40M-0215)
NitrogenN2 purge saver
ControlSitek SlickDevice SI touch screen controller
RecipesUp to 20 programmable recipes
Capacity25 wafers

Key Documents

SOP & Hazard AssessmentSitek SemiTool 870-S SOP & HA Listing

Related Documents

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