Skip to end of metadata
Go to start of metadata

Overview

SemiTool 870-S double stack SRD. Top unit suitable for up to 150 mm substrates, bottom rotor suitable for 100m, round substrates.

System Features

Top Rotor150 mm (A190-60M-0215)
Botom Rotor100 mm (A190-40M-0215)
NitrogenN2 purge saver
ControlSitek SlickDevice SI touch screen controller
RecipesUp to 20 programmable recipes
Capacity25 wafers

Key Documents

Related Documents

There is no content with the specified labels