Sitek - SemiTool 840-S SRD

Overview

SemiTool 840-S double stack SRD. Top unit suitable for up to 100 mm square substrates, bottom rotor suitable for 100m, round substrates.

LMACS Name	Sitek 840-S SRD (top - 100 mm round) Sitek 840-S SRD (bottom - 100 mm square)
Confluence Label	sitek-semitool-840-s-srd
Process Area	Wet Processing
Model	SemiTool 840-S
Vendor	Sitek Process
Team	Breanna Cherkawski Gustavo de Oliveira Luiz Scott Munro Timothy Harrison Adam Pettigrew Aaron Hryciw

Top - 100mm Round

Bottom - 100mm Square

System Features

Top Rotor	100 mm (A192-40M)
Botom Rotor	100 mm (A190-40)
Nitrogen	N2 purge saver
Control	Sitek SlickDevice SI touch screen controller
Recipes	Up to 5 programmable recipes
Capacity	25 wafers

SOP
Hazard Assessment