SemiTool 840-S double stack SRD. Top unit suitable for up to 100 mm square substrates, bottom rotor suitable for 100m, round substrates.

System Features

Top Rotor100 mm (A192-40M)
Botom Rotor100 mm (A190-40)
NitrogenN2 purge saver
ControlSitek SlickDevice SI touch screen controller
RecipesUp to 5 programmable recipes
Capacity25 wafers

Key Documents

Hazard Assessment