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nanoFAB Equipment
Equipment List
Oxford NGP80 RIE
Jira links
Processing on the Oxford NGP80
Created by
Aaron Hryciw
, last modified by
Michael Hume
on
Mar 25, 2021
Equipment
Oxford PlasmaPro NGP80 RIE
Synonyms
RIE
Process Area
Plasma Etch
application-note
rie
sop
oxford-ngp80-rie
plasma
etch
plasma-etch
Overview
Content Tools
{"serverDuration": 65, "requestCorrelationId": "6730d80dadbd6434"}