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nanoFAB Equipment
Equipment List
Oxford Estrelas ICPRIE (DRIE)
Jira links
Processing on the Oxford Estrelas
Applicable Equipment
Oxford Estrelas ICPRIE (DRIE)
Synonyms
DRIE, ICP RIE
Process Area
Plasma Etch
application-note
oxford-estrelas-icprie
sop
plasma
etch
plasma-etch
Overview
Content Tools
{"serverDuration": 73, "requestCorrelationId": "dc460c4143195186"}