Overview

The PDS 2010 is a vacuum system used for the vapour deposition of the parylene polymer onto a variety of substrates. The clear polymer coating provides an extremely effective chemical and moisture barrier with high dielectric and mechanical strength.

LMACS NameParylene Deposition System
Confluence Labelpds-2010-paralyne-deposition-system
Process Area

Deposition

ModelPDS-2010
VendorSpecialty Coating Systems
Team

Timothy Harrison  Glenn Elaschuk Aaron Hryciw





System Features

  • Parylene C and parylene N are provided
  • Maximum substrate size: 20 cm diameter, 26 cm height
  • Two removable jigs are available with 20 cm diameter shelves, although support posts reduce clear area to ~15 cm diameter:
    1) Two shelves with 10 cm and 8.5 cm headroom
    2) Three shelves with 9 cm, 9 cm, and 4.5 cm headroom
Parylene typeCharacteristicsDeposition parameters

Parylene C

  • Typically used for thicker coatings (several µm)
  • Useful combination of electrical and physicals properties for most applications
  • Very low permeability to moisture and corrosive gases
  • Insoluble in any solvent at room temperature
  • Average crevice-penetrating ability
  • ~5 µm/hr (0.0002"/hr)
  • 500 nm/g
  • 125 g max per run
Parylene N
  • Typically used for thinner coatings (nm to a few µm)
  • High dielectric strength
  • Low, frequency invariant dielectric constant
  • Very low dissipation factor
  • Very high crevice-penetrating ability
  • 760 nm/hr (0.00003"/hr)
  • 100 nm/g
  • 125 g max per run

Documents

Operating Procedure

Parylene Deposition System SOP

Hazard Assessment
Datasheet

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