System Features
Wafer Handling | pieces (unmounted) | 100 mm | 150 mm | |||
---|---|---|---|---|---|---|
Gas Species | O2 | CF4 | SF6 | Ar | CHF3 | N2 |
RF Power | 300 W | |||||
Chuck | 5 ºC (min) | 80 ºC (max) | graphite chuck |
Documents
Operating Procedure | |
---|---|
Hazard Assessment | Oxford NGP80 RIE Hazard Assessment - HA |
Process Information | Processing on the Oxford NGP80 |
Related Documents