Overview

The Variable Angle Spectroscopic Ellipsometer is capable of high accuracy measurement of various optical properties of thin film materials.  It is primarily used to measure the film thickness and/or optical constants from a thin film.  Analysis is simplest for single-layer films deposited on a Si substrate, although analysis of multilayer specimens is also reasonably straightforward.

LMACS NameVASE Ellipsometer
Confluence Labelvase-vb-400
Process Area

Characterization

ModelVASE VB-400
VendorJ.A. Woollam
Team

Josh Perkins Devin Fortier Peng Li 





System Features

  • 300–1700 nm spectral range
  • Reflection and transmission ellipsometry
  • Reflectance (R) intensity
  • Transmission (T) intensity
  • Depolarization, scatterometry, Mueller-matrix
  • RAE + autoretarder equipped

Documents

Operating Procedure

J.A. Woollam VASE Ellipsometer SOP

Hazard AssessmentJ.A. Woollam VASE Ellipsometer HA

Related Documents

2 Comments

  1. Michael Hume

    Peng Li  / Shihong Xu - can we clarify which system this page is for? VB-250 or M2000? I presume the 250 since the upgrade page is attached here. If that's true - will need to create a second page for the M-2000V

    1. Michael Hume

      For now I will record the SN / UofA tags for the M-2000V here - it seems the inventory people were very enthusiastic when tagging this system, there are so many. We can transfer later


      VASE M-2000V 

      ComponentUofA TagSN
      HTC-1005436220905104
      EC-4005436230909048
      M-2000V PS5436240909058
      Light Source543625
      		*need to confirm the component
      Detector543626
      		*need to confirm the component
      Base543627