Step-By-Step Guide
- Create a new request in LMACS
- Enter PVD-75 Material Change for the Title.
- Select the Equipment Configuration Type.
- Select Electron-Beam Evaporation System #2 (PVD-75) for the Equipment.
- In the Summary, enter the desired deposition material from the approved list (e.g., Cu).
- Add a new Booking within the request, selecting the Electron-Beam Evaporation System #2 (PVD-75).
- Add an additional 30 mins to the beginning and end of your processing time to allow for the material changes.
- A nanoFAB staff member will change the crucible material during these additional 30 minute slots.
- Once the material has been changed, a comment will be added to the request.
- Login and use the system as usual and you will be billed for the actual used time.