This procedure describes the process required to specify or request a specific material in Pocket 5 (other than the default, Ag) for the Electron-Beam Evaporation System #2 (PVD-75). See the Confluence Equipment page for the tool for the list of approved materials. In order to ensure that there is sufficient time to restore the default material, you must complete your session at least 30 minutes before the end of regular business hours (typically 5:00 pm).

EquipmentElectron-Beam Evaporation System #2 (PVD-75)
Process Area



Step-By-Step Guide

  1. Create a new request in LMACS
    1. Enter PVD-75 Material Change for the Title.
    2. Select the Equipment Configuration Type.
    3. Select Electron-Beam Evaporation System #2 (PVD-75) for the Equipment.
    4. In the Summary, enter the desired deposition material from the approved list (e.g., Cu).
  2. Add a new Booking within the request, selecting the Electron-Beam Evaporation System #2 (PVD-75).
    1. Add an additional 30 mins to the beginning and end of your processing time to allow for the material changes. 
    2. A nanoFAB staff member will change the crucible material during these additional 30 minute slots. 
  3. Once the material has been changed, a comment will be added to the request.
  4. Login and use the system as usual and you will be billed for the actual used time.