Overview

Lucus Pro4 4000 sheet and bulk resistivity measurement system with Keithley 2601A sourcemeter, range: 1 mΩ to 100 MΩ per cm square. Identify Si wafer N/P type.

LMACS Name

Four-Point Probe (Pro4 4000)

Confluence Label

lucasLabs-pro4-6M00

Process Area

Characterization

ModelPro4-6M00
VendorLucas Labs
Team



System Features

Resistivity Range1 mΩ to 100 MΩ per cm square
Current Rangeis 5E-08 to 1000 mA.
Minimum sample size4 *4 mm