Four-Point Probe

Overview

Lucus Pro4 4000 sheet and bulk resistivity measurement system with Keithley 2601A sourcemeter, range: 1 mΩ to 100 MΩ per cm square. Identify Si wafer N/P type.

LMACS Name	Four-Point Probe (Pro4 4000)
Confluence Label	lucasLabs-pro4-6M00
Process Area	Characterization
Model	Pro4-6M00
Vendor	Lucas Labs
Team	Nastaran Yousefi Devin Fortier Peng Li

System Features

Resistivity Range	1 mΩ to 100 MΩ per cm square
Current Range	is 5E-08 to 1000 mA.
Minimum sample size	4 *4 mm

Key Documents

SOP	Four-Point Probe (Pro4 4000) SOP
Hazard Assessment	Characterization Lab ECERF W1-040 General HA

Related Documents

Page:
Parylene Deposition System (Equipment)
Page:
Disco DAD 3240 Dicing Saw (Equipment)
Page:
Olympus LEXT OLS3100 Confocal Laser Scanning (Equipment)
Page:
Suss CB6L Bonder (Equipment)
Page:
How-To Request a Dicing Blade Change (Equipment)
Page:
KLA - Alpha-Step IQ Profilometer - Cleanroom (Equipment)
Page:
KLA - Alpha-Step IQ Profilometer - Characterization (Equipment)
Page:
Nikon Eclipse L200N Inspection Microscope (Equipment)
Page:
Tystar LPCVD - Tube 4 (doped Poly Si) (Equipment)
Page:
Tystar - Tube 7 (Oxidation) (Equipment)
Page:
Tystar - Tube 6 (General Anneal) (Equipment)
Page:
Tystar - Tube 5 (Doped Anneal) (Equipment)
Page:
Savant Super Modulyo Freeze Dryer (Equipment)
Page:
Zeiss EVO SEM SOP (Equipment)
Page:
Zeiss EVO MA10 SEM (Equipment)

Space shortcuts

Page tree

Four-Point Probe (Pro4 4000)

System Features

Key Documents

Related Documents