The Filmetrics F50-UV is a thin-film metrology tool which measures film thickness via spectroscopic reflectometry, with an automated stage to enable efficient collection of thickness uniformity maps.

System Features

Substrate size: ~5 mm × 5 mm to 200 mm diameter

Thickness measurement range: 5 nm – 40 µm
Min. thickness to measure n and k: 50 nm
Wavelength range: 190–1100 nm
Spot size: 1.5 mm
Light source: deuterium + tungsten-halogen (dual light source: may choose one or both lamps)
Measurement results visualisation in 2D and 3D