Overview

The Filmetrics F50-UV is a thin-film metrology tool which measures film thickness via spectroscopic reflectometry, with an automated stage to enable efficient collection of thickness uniformity maps.

LMACS NameFilmetrics F50-UV
Confluence Labelfilmetrics-f50-uv
Process Area

Characterization

ModelF50-UV
VendorFilmetrics
Team

Aaron Hryciw Scott Munro Devin Fortier





System Features

•

Substrate size: ~5 mm × 5 mm to 200 mm diameter

•Thickness measurement range: 5 nm – 40 µm
•Min. thickness to measure n and k: 50 nm
•Wavelength range: 190–1100 nm
•Spot size: 1.5 mm
•Light source: deuterium + tungsten-halogen (dual light source: may choose one or both lamps)
•Measurement results visualisation in 2D and 3D

Documents

Operating Procedure

Filmetrics F50-UV SOP

Hazard Assessment

Filmetrics F50 UV Hazard Assessment

Related Documents