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Overview

Thermogravimetric Analysis.  This equipment measure the weight loss verse temperature in different gas environment.

LMACS NameDiscovery TGA
Confluence Label

TA-Discovery-TGA

Process Area

Characterization

Model
VendorTA instrument
Team



System Features

Wafer Handlingpieces (mounted)100 mm150 mm
Gas SpeciesO2C4F8SF6Ar
ICP Power3 kW


RF Power300 W


Chuck-150 ºC (min)80 ºC (max)mechanical clampHBC