Critical Point Dryer

Overview

The Tousimis 815b critical point dryer is designed as an anti-stiction, CO₂ dry release process, typically following a wet etch process.

LMACS Name	Critical Point Dryer
Confluence Label	critical-point-drier
Process Area	Ancillary
Model	Tousimis 815b
Vendor	Tousimis
Team	Scott Munro Aaron Hryciw Devin Fortier Adam Pettigrew

System Features

1	100mm chamber size. Up to 5 x 100mm wafers may be dried at a time, using the 100mm boat and spacers.
2	Small pieces can be placed directly in the chamber, or using the appropriate sized baskets.
3	1cm holder available for small 1cm x 1cm die.
4	Teflon spacers available for reduced CO2 volumes and processing times.

SOP	Critical Point Drier SOP
Hazard Assessment	Critical Point Dryer Hazard Assessement - HA