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Overview

The Tousimis 815b critical point dryer is designed as an anti-stiction, CO₂ dry release process, typically following a wet etch process.

LMACS NameCritical Point Dryer
Confluence Labelcritical-point-drier
Process Area

Ancillary

ModelTousimis 815b
VendorTousimis
Team



System Features


1100mm chamber size.  Up to 5 x 100mm wafers may be dried at a time, using the 100mm boat and spacers.
2Small pieces can be placed directly in the chamber, or using the appropriate sized baskets.
31cm holder available for small 1cm x 1cm die.
4Teflon spacers available for reduced CO2 volumes and processing times.