Overview

A batch barrel etcher for the removal of photoresist, descum, and surface activation

LMACS Name

Branson 3000 Barrel Etcher

Confluence Label

BRANSON-BARREL-ETCHER

Process Area

Plasma Etch

Model3000
Vendor

Allwin 21 (Branson IPC)

Team



System Features


Documents

Operating Procedure

Hazard Assessment