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ABM UV Flood Exposure System - Sunny

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Created by Adam Pettigrew, last modified by Davor Karacic on Mar 18, 2021

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Overview

The UV Flood Exposure system provides uniform UV exposure over a wide area. It is primarily used for resist stripping and curing.

LMACS Name	UV Flood Exposure System (Sunny)
Confluence Label	abm-uv-flood-exposure-system-sunny
Process Area	Lithography
Model	N/A
Vendor	ABM USA
Team	Stephanie Bozic Scott Munro Adam Pettigrew

System Features

Wafer Handling	pieces	100 mm	150 mm	Up to 7"x7"
Exposure	Manual	Automated

Key Documents

SOP	ABM UV Flood Exposure System - Sunny - SOP
Hazard Assessment	ABM UV Flood Exposure System - Sunny - HA

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