Overview

The UV Flood Exposure system provides uniform UV exposure over a wide area. It is primarily used for resist stripping and curing.

LMACS NameUV Flood Exposure System (Sunny)
Confluence Labelabm-uv-flood-exposure-system-sunny
Process Area

Lithography

ModelN/A
VendorABM USA
Team



System Features

Wafer Handlingpieces100 mm150 mmUp to 7"x7"
ExposureManualAutomated

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