ABM Mask Aligner - Grover

Overview

Contact Lithography Mask Aligner

LMACS Name	Mask Aligner (Grover)
Confluence Label	abm-mask-aligner-grover
Process Area	Lithography
Model	ABM Large Area Manual Mask Aligner System With Split-Field Dual CCD Camera Alignment
Vendor	ABM USA
Team	Breanna Cherkawski Scott Munro Adam Pettigrew

System Features

1	Tooling: 3", 4", and 6" diameter wafers, 4" x 4" square substrates, and small pieces
2	Mask tooling: 5" x 5" or 7" x 7" square photomasks
3	UV illumination (365 nm & 405 nm)

Key Documents

SOP	ABM Mask Aligner - Grover - SOP
Hazard Assessment	N/A

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