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Overview

Contact Lithography Mask Aligner

System Features

1Tooling: 3", 4", and 6" diameter wafers, 4" x 4" square substrates, and small pieces
2Mask tooling: 5" x  5" or 7" x 7" square photomasks
3UV illumination (365 nm & 405 nm)

Key Documents

SOPABM Mask Aligner - Grover - SOP
Hazard AssessmentN/A

Related Documents