ABM Mask Aligner - Bert

Overview

Contact lithography mask aligners

LMACS Name	Mask Aligner (IR through-wafer) (Bert)
Confluence Label	abm-mask-aligner-bert
Process Area	Lithography
Model	ABM Manual Mask Aligner System With Split-Field Microscope Frontside And BSV/BSIR Backside Alignment
Vendor	ABM USA
Team	Breanna Cherkawski Scott Munro Adam Pettigrew

System Features

1	IR through-wafer imaging for backside alignment (4" diameter wafers with 5" x 5" photomasks only)
2	Tooling: 3", 4", and 6" diameter wafers, 4" x 4" square substrates, and small pieces
3	Mask tooling: 5" x 5" or 7" x 7" square photomasks
4	UV illumination (365 nm & 405 nm)

Key Documents

Operating Procedure	ABM Mask Aligner - Bert - SOP
Hazard Assessment	N/A

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